Semiconductor manufacturing for technicians

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Semiconductor manufacturing for...

Semiconductor manufacturing for technicians

Name: Semiconductor manufacturing for technicians
ISBN: 9780130815200

Michael Quirk, Julian Serda

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1. Introduction to the Semiconductor Industry. 2. Characteristics of Semiconductor Materials. 3. Device Technologies. 4. Silicon and Wafer Preparation. 5. Chemicals in Semiconductor Fabrication. 6. Contamination Controls in Wafer Fabs. 7. Metrology and Defect Inspection. 8. Gas Control in Process Chambers. 9. IC Fabrication Process Overview. 10. Oxidation. 11. Deposition. 12. Metallization. 13. Photolithography: Vapor Prime to Soft Bake. 14. Photolithography: Alignment and Exposure. 15. Photolithography: Photoresist Development and Advanced Lithography. 16. Etch. 17. Ion Implant. 18. Chemical Mechanical Planarization. 19. Wafer Test. 20. Assembly and Packaging. Appendices. Glossary. Index

Thể loại:

Engineering

Năm:

2000

Nhà xuát bản:

Prentice Hall

Ngôn ngữ:

english

Trang:

510

ISBN 10:

0130815209